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[ pdf ] Design and Construct of a High-Precision and Long-Stroke AFM Probe

 Design and Construct of a High-Precision and Long-Stroke AFM Probe Download
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Topic under  Precision measuring
Source: www.nano.mech.tohoku.ac.jp 
File size: 3.84 MB
File type: pdf
Last download on: Thu Apr 12, 2018 02:06:56 AM
Short Desciption:
measuring the displacement of the PZT actuator. The encoder scale is aligned along the ... obtained with a high precision from the linear encoder output


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