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Introduction Many types of miniaturized machine tools have been developed for ... of a precision aerostatic spindle integrated with axial positioning actuator, precision measurement ...
Many types of miniaturized machine tools have been developed for machining micro mechanical parts and to save energy, space and resources [1-3]. The next targets for the miniaturized machine tools will be multi-axis and ultra-precision machining. Conventional multi-axis machine tools are constructed from several stacked one-degree-of-freedom (one-DOF) positioning mechanisms to realize multi-degrees-of-freedom motion . The stacked positioning mechanism is not suitable for miniaturization or ultra-precision motion control, due to the cumulative effect of the space occupied by several one-DOF positioning mechanisms and non-collocation of actuators with displacement feedback sensors.
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"A PRECISION ACTIVE AEROSTATIC SPINDLE WITH AN AXIAL POSITIONING ..."
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