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[ pdf ] Design of a Precision Linear-Rotary Positioning Actuator

Design of a Precision Linear-Rotary Positioning Actuator Download
Topic under  Precision measuring
Source: www.nano.mech.tohoku.ac.jp 
File size: 222.28 KB
File type: pdf
Last download on: Sat Mar 25, 2017 02:40:16 PM
Short Desciption:
Keywords: precision positioning, actuator, linear-rotary actuator, PZT 1. Introduction Precision ... actuator based on measurement results of a surface encoder for precision ...

Precision positioning actuators are widely used in precision machines, semiconductor equipment, and measuring instruments. Linear single-axis positioning actuators driven by piezoelectric actuators (PZTs) were developed because the PZT provides high resolution and fast response. Some extend the moving stroke of the PZT-driven positioning actuator. In the “walking drive” method, he moving element is driven smoothly and continuously over a long stroke by repeating clamping and feeding of multiple PZTs [1]. An ultra-precision positioning system has been constructed by using the “working drive” combined with a laser interferometer for feedback control. The clamping PZTs make the “working drive” mechanism have large thrust force but reduce the bandwidth of the system. The smooth impact drive mechanism (SIDM), which only employs one PZT and a friction component,
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    "Design of a Precision Linear-Rotary Positioning Actuator"



    Posted by linearacuators
    Sat May 28, 2011 04:20:36 PM

    Linear actuators are the machines that are primary blocks that are used to determine live wire automation equipment. The external energy source may be as diverse as hydraulic, mechanical, Piezoelectric, Pneumatic and Electro-mechanical. For more detail visit: http://www.progressiveautomations.com

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