# Home > Actuators > Precision measuring

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**Topic under **Precision measuring

**Source:** www.nano.mech.tohoku.ac.jp

**File size:** **222.28 KB**

**File type:** **pdf**

**Last download on:**
Sun Feb 18, 2018 01:37:42 PM

__Short Desciption__:

Keywords: precision positioning, actuator, linear-rotary actuator, PZT 1. Introduction Precision ... actuator based on measurement results of a surface encoder for precision ...

__Summary__:

Precision positioning actuators are widely used in precision
machines, semiconductor equipment, and measuring
instruments. Linear single-axis positioning actuators
driven by piezoelectric actuators (PZTs) were developed
because the PZT provides high resolution and fast response.
Some extend the moving stroke of the PZT-driven
positioning actuator. In the “walking drive” method, he
moving element is driven smoothly and continuously over
a long stroke by repeating clamping and feeding of multiple
PZTs [1]. An ultra-precision positioning system
has been constructed by using the “working drive” combined
with a laser interferometer for feedback control.
The clamping PZTs make the “working drive” mechanism
have large thrust force but reduce the bandwidth of the
system. The smooth impact drive mechanism (SIDM),
which only employs one PZT and a friction component,

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"Design of a Precision Linear-Rotary Positioning Actuator"

*linearacuators*

Sat May 28, 2011 04:20:36 PM

Linear actuators are the machines that are primary blocks that are used to determine live wire automation equipment. The external energy source may be as diverse as hydraulic, mechanical, Piezoelectric, Pneumatic and Electro-mechanical.
For more detail
visit: http://www.progressiveautomations.com

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