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**Topic under **Precision measuring

**Source:** www.iisme.org

**File size:** **1.12 MB**

**File type:** **pdf**

**Last download on:**
Thu Apr 12, 2018 02:07:59 AM

__Short Desciption__:

Introduction of Precision Measurement of Nano-Dimensional Scales. Using Laser

__Summary__:

Learning Objectives
Upon the implementation of this ETP, the students will be able to
(1) describe a typical setup of a Nano-dimensional measurement system using laser
interferometer, including a sensor (photodetector) and a data acquisition system,
(2) explain the characteristics and functions of each major component in the system,
(3) illustrate how to install and align the optics to achieve the best measuring results,
(4) perform the experimental/measurement data analyses through a computer,
(5) know how to compensate the fluctuation of temperature, humidity, pressure, as well
as mechanical and electrical noise during measurement,
(6) understand the difference between the normal-scale measurement system and a
nano-scale measurement system.

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"Introduction of Precision Measurement of Nano-Dimensional Scales"

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