# Home > Actuators > Precision measuring

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**Topic under **Precision measuring

**Source:** www.nanowerk.com

**File size:** **428.56 KB**

**File type:** **pdf**

**Last download on:**
Thu Apr 12, 2018 02:55:33 AM

__Short Desciption__:

(a) FEM simulation; (b) Measurement. To obtain slider motion with the pusher in the ... A new type of ultrasonic piezoelectric actuator for ultra-precision

__Summary__:

Physik Instrumente (PI) has developed a new type of ultrasonic piezoelectric actuator which can be used
effectively in direct linear drives. The actuators are of simple construction and allow design of very compact, fast
and inexpensive micropositioning systems. The actuators consist of a rectangular piezoceramic plate with a
common electrode on one surface and two symmetrical excitation electrodes on the opposing surface. A pusher,
which makes frictional contact with a slider is attached to one long edge of the actuator at the gap between the
excitation electrodes. During operation, a two-dimensional standing wave is created by exciting the piezoceramic
plate asymmetrically. The resultant motion of the pusher is linear and inclined relative to the actuator. The slider
moves as a result of the minute, high-frequency, angled impulses it receives from the pusher. The article explains
the working principle of the new actuators using FEM simulation data, and presents the new linear precision
drives from PI which operate on this principle.

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