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Failure Mode and Effects Analysis (FMEA): A Guide for Continuous Improvement for the Semiconductor Equipment Industry. This paper provides guidelines on the use of Failure Mode and Effects Analysis (FMEA) forrnensuring that reliability is designed into typical semiconductor manufacturing equipment. Thesernare steps taken during the design phase of the equipment life cycle to ensure that reliability requirements have been properly allocated and that a process for continuous improvement exists
The guide provides information and examples regarding the proper use of FMEA as it applies tornsemiconductor manufacturing equipment. The guide attempts to encourage the use of FMEAs torncut down cost and avoid the embarrassment of discovering problems (i.e., defects, failures,rndowntime, scrap loss) in the field. The FMEA is a proactive approach to solving potential failurernmodes. Software for executing an FMEA is available from SEMATECH, Technology TransferrnNumber 92091302A-XFR, SEMATECH Failure Modes and Effects Analysis (FMEA) SoftwarernTool. Keywords:rnFailure Modes and Effects Analysis, Reliability, Functional, Risk Priority Number
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"Failure Mode and Effects Analysis-FMEA A Guide"
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