Home > Machinery > Material Sciences

[ pdf ] Evaluation of Mechanical Properties of MEMS Materials and Their Standardization

Evaluation of Mechanical Properties of MEMS Materials and Their Standardization Download
Topic under  Material Sciences
Source: www.wiley-vch.de 
File size: 2.69 MB
File type: pdf
Last download on: Thu Apr 12, 2018 05:30:50 AM
Short Desciption:
The importance of the mechanical properties evaluation on designing and evaluating MEMS and the development of standard on MEMS are described in this chapter. First, in order to confi rm their importance, the effect of mechanical properties on the performance of MEMS is pointed out. Second, to reveal the accuracy and repeatability of the existing evaluation methods, a work for cross comparisons is described. Then, the current workings on the international standard development on thin fi lm mechanical properaties to improve the reliability, repeatability, and accuracy in the mechanical properties evaluation are introduced.

Bookmark or share this info on Google+ and leave comment at below :

Bookmark and Share

People who downloaded this also viewed in this sites:

Rockwell Hardness Measurement of Metallic Materials
1. Introduction 1.1. IntroductionIntroduction 2. Rockwell Hardness Test 2.1 Significance of the test 2.2 Rockwell indentation test...

Inspection, evaluation and repair of hydraulic steel structures
Chapter 1 Introduction Purpose Applicability Distribution References Background Mandatory Requirements......

Fundamentals Handbook Material Science
DOE-HDBK-1017/1-93. JANUARY 1993. DOE FUNDAMENTALS HANDBOOK. MATERIAL SCIENCE. Volume 1 of 2. U.S. Department of Energy. FSC-6910. Washington, D.C....

    Leave comment :
    "Evaluation of Mechanical Properties of MEMS Materials and Their Standardization"



    Related Free Files

    Tutorial Materials for Compressible Flow and... - Download: 172 times
    Metallurgy of Steel for Bladesmiths &... - Download: 198 times
    Stainless Steels Their properties and their... - Download: 218 times
    Fundamentals Handbook Material Science... - Download: 621 times
    Rockwell Hardness Measurement of Metallic... - Download: 250 times
    Inspection, evaluation and repair of... - Download: 181 times

    eXTReMe Tracker