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[ pdf ] CORIOLIS MASS FLOW DENSITY AND TEMPERATURE SENSING WITH A SINGLE VACCUM SEALED MEMS CHIP

CORIOLIS MASS FLOW DENSITY AND TEMPERATURE SENSING WITH A SINGLE VACCUM SEALED MEMS CHIP Download
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Topic under  Flow Measurement
Source: www.mems-issys.com 
File size: 481.01 KB
File type: pdf
Last download on: Mon May 22, 2017 08:59:08 PM
Short Desciption:
flow rate, dose, chemical concentration, fluid density, specific gravity and temperature has been developed. Vacuum packaged, resonating silicon microtubes are employed to form both a Coriolis mass flow and density sensor. The micro Coriolis mass flow sensor has 10 times the resolution of the best commercially available macro Coriolis mass flow sensors. An onchip temperature sensor (RTD) has been added to the microchip, enabling accurate fluid temperature monitoring. At constant temperature the density resolution/or output stability approaches 1 over 1 million (6 digits) in the new system. Also a new method of chip-level gettering was developed to achieve the milliTorr pressures needed for adequate resonator signal quality for the vacuum packaged microsensors. Applications for both mass flow measurements and density sensing are discussed.

Summary:
A new microfluidic system for measuring the mass flow rate, dose, chemical concentration, fluid density, specific gravity and temperature has been developed. Vacuum packaged, resonating silicon microtubes are employed to form both a density meter and a Coriolis mass flow sensor. An on-chip temperature sensor has been added to the microchip, enabling accurate fluid temperature monitoring. As part of this development effort, a new method of gettering was developed to achieve the sub-milliTorr pressures needed for adequate resonator signal quality. With this NanoGetterTM, Q values above 45,000 were obtained. MEMS-based, Coriolis mass flow and density sensors have been developed that are suitable for medical, industrial and laboratory applications
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